Influence of Point Defects on the Equilibrium Concentration of Interstitial Oxygen in Crystalline Silicon
نویسندگان
چکیده
The effect of excess point defects on the equilibrium concentration interstitial oxygen for system oxygen/SiO2 precipitates in crystalline Si is theoretically investigated. expression modified by derived. Excess vacancies are found to decrease this concentration, while self-interstitials have opposite effect. effects different conditions defect generation studied.
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ژورنال
عنوان ژورنال: Ukrainian Journal of Physics
سال: 2022
ISSN: ['2071-0186', '2071-0194']
DOI: https://doi.org/10.15407/ujpe56.6.570